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Ushio QIH480-6000ASM EPI Lamp for ASM Barrel Reactor

Ushio QIH480-6000ASM Reactor Lamp For ASM Barrel

$70.00
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SKU:
QIH480-6000ASM (1002018)
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Product Description
High-power quartz halogen infrared heater lamp for semiconductor epitaxy tools (ASM barrel reactor applications).
SOSCleanroom
Overview

The Ushio QIH480-6000ASM is a high-output quartz halogen infrared (QIH) heater lamp designed for semiconductor process equipment that depends on fast, controllable radiant heating. It is commonly specified for ASM barrel reactor epitaxy (EPI) configurations where repeatable thermal performance and stable output support process control. SKU: QIH480-6000ASM (1002018).

Key Highlights
  • Mfg. Ordering Code: 1002018
  • Operating Wattage: 6000W
  • Operating Voltage: 480V
  • Operating Current: 12.5A
  • Color Temperature: 3050K
  • Average Life: 1500 hours
  • Machine Model: EPI Reactor
Typical Applications
  • ASM barrel reactor (EPI) heating (tool-dependent)
  • Semiconductor thermal process zones requiring stable radiant heating for repeatable recipes
  • Process equipment where controlled IR output supports process consistency and uptime
Handling Tip 
QIH heater lamps operate at high temperature and high voltage. Follow your tool’s lockout/tagout procedure and allow full cool-down before servicing. Avoid touching the quartz with bare hands—use clean nitrile gloves and/or a lint-free wipe to reduce residue that can create localized hot spots and shorten lamp life.
About Ushio
Ushio is a global photonics and specialty light source company that develops lamps, LEDs, lasers, and light-based systems used across industrial and scientific markets—including semiconductor-related applications. Ushio’s “Applying Light to Life” focus reflects the company’s commitment to light as both illumination and energy, spanning ultraviolet through infrared technologies.
Industry Update:
In July 2025, Ushio announced an agreement to acquire ams OSRAM’s Entertainment & Industry Lamps (ENI) business, with closing anticipated by the end of March 2026. During and after a transition, customers may see changes such as labeling, packaging, part-number presentation, and distribution channels. Best practice: qualify replacements by the manufacturer code and critical specs (for this lamp: 480V / 6000W / 12.5A plus tool-required mechanical interfaces) to ensure continuity.

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Always confirm compatibility with your exact tool configuration (electrical rating, approved lamp house/terminal interface, allowed orientation, and recipe requirements) prior to installation.
The Technical Vault
By SOSCleanroom
Quartz IR Heater Engineering
How It Works Semiconductor Heating Power & Controls Safety & Handling
Quick Specs
Manufacturer / Ordering Code Ushio QIH480-6000ASM  |  1002018
Lamp Type / Technology Quartz halogen infrared heater (QIH) for semiconductor thermal processing
Operating Wattage / Voltage / Current 6000W / 480V / 12.5A
Color Temperature 3050K
Average Lifetime 1500 hours
Primary Application ASM barrel reactor (EPI) heating (tool-dependent)
How QIH Heater Lamps Work (Engineering View)
A quartz halogen infrared heater is an incandescent thermal radiator optimized for heat delivery. When current flows through the tungsten filament, electrical resistance converts input power into heat. At operating temperature, the filament emits a broad continuous spectrum. In heater designs, a substantial portion of emission sits in the near-infrared, which is effectively managed using reflectors and lamp-house geometries to deliver controlled radiant heat into the process zone.
The “halogen” component is a carefully controlled fill gas chemistry (an inert gas plus a small amount of halogen species) inside a quartz (high-silica) envelope. During operation, tungsten slowly evaporates from the filament. In a standard incandescent lamp, that tungsten can deposit on the envelope (blackening) and reduce output. In a halogen heater, evaporated tungsten reacts with halogen to form tungsten-halide compounds that migrate; near the hottest region the compound dissociates, returning tungsten back to the filament. This halogen cycle supports more stable radiant output over life when the lamp is operated within its design envelope.
Quartz construction enables higher envelope temperatures than conventional glass, which supports heater-lamp performance. Filament geometry and internal supports are engineered for repeatable radiant output and robust operation under frequent thermal cycling—important for process tools that rely on predictable ramp/hold behavior.
Why Semiconductor Tools Use QIH Heaters
  • Fast thermal response: radiant heating reaches target output quickly, enabling recipe ramps and tighter process windows.
  • Controllability: lamp power can be modulated in real time through the tool’s controls to maintain temperature stability (zone-dependent).
  • Thermal uniformity management: reflector design, lamp placement, and airflow/cooling strategies help shape where heat is delivered.
  • Repeatability: stable radiant output supports consistent process performance across maintenance cycles.
Power, Controls, and Lamp-Life Drivers
  • Voltage discipline: filament temperature is strongly tied to voltage; sustained over-voltage increases evaporation and reduces life.
  • Ramp profiles: controlled ramp-up reduces thermal shock and mechanical stress on filament and seals.
  • Regulation quality: excessive ripple or control oscillation can impact output stability and component wear.
  • Matched replacements: if the tool uses multiple lamps/banks, follow OEM grouping/matching guidance to preserve thermal uniformity.
Installation, Handling, and Qualification Notes
  • Confirm the interface: verify lamp-house mounting, terminal style, and any alignment constraints required by the tool.
  • Keep quartz clean: fingerprints and residues can create localized hot spots—use clean nitrile gloves and lint-free wipes.
  • Protect reflectors and nearby optics: avoid debris/particulates during service; stage wipes/swabs for controlled cleaning as needed.
  • Follow the tool’s qualification procedure: after replacement, confirm return to recipe targets (stability, uniformity, and safety interlocks).
Industry Update: ENI Business Transaction (Expected Close by End of March 2026)
In July 2025, Ushio announced an agreement to acquire ams OSRAM’s Entertainment & Industry Lamps (ENI) business, with closing anticipated by the end of March 2026. For tool owners, the practical takeaway is disciplined documentation and replacement qualification: retain core identifiers (QIH480-6000ASM / 1002018) and validate replacements by electrical rating, mechanical interface, and the process performance expectations of your chamber.
Cleanroom Considerations

Treat heater lamp changes as a controlled maintenance event: minimize packaging debris, prevent particulate transfer to reflectors and quartz windows, and keep service tooling low-lint.

Stage clean nitrile gloves plus cleanroom-grade lint-free wipes/swabs during installation to reduce contamination risk and prevent residue transfer to quartz and nearby optical/thermal surfaces.

Need deeper specs or cross-references?
If you need additional information please try our SOSCleanroom specific AI ChatBot which draws from our extensive cleanroom specific libraries.
For semiconductor tools, confirm OEM requirements (approved power/control method, lamp house hardware, allowable orientation, cooling/airflow, and safety interlocks) and follow the tool’s qualification procedure prior to return-to-service.