Start here
Choose the Ushio document before selecting a replacement lamp.
This page is a manufacturer-literature hub and practical sourcing guide for Ushio UV, IR, xenon, mercury short-arc, halogen and specialty photonics. It connects manufacturer documents to specific SOSCleanroom listings and related buying resources. Lamp selection begins with the installed equipment and manufacturer part number—not an approximate wattage or a generic lamp-family name.
01 · Document
Identify the actual Ushio family
02 · Verify
Match critical specifications
03 · Source
Open the exact product listing
04 · Control
Document the replacement
Essential distinction
Decision matrix
Which type of Ushio light source fits the job?
| Application or equipment | Typical Ushio literature family | What matters most | Where to look |
|---|---|---|---|
| Microscopy / analytical UV-visible | Short-arc mercury (USH), xenon (UXL), EmArc | Lamp envelope, arc gap, optical alignment, power supply, housing | Short-arc selection |
| Photolithography / exposure equipment | Tool-approved mercury, UV or other exposure source | Spectral band, intensity/dose stability, arc/filament geometry, optics and certified tool configuration | Semiconductor guide |
| Wafer processing / semiconductor heating | QIH quartz infrared and specialty halogen | Voltage, terminals, heat distribution, mechanical geometry and thermal control | IR / reactor options |
| Graphic arts, ink and coatings | UV exposure / curing; QIH heating; specialty lamps | Target wavelength, irradiance, dose, heat, substrate response | Process UV |
| UV-C / germicidal equipment | Low-pressure mercury, excimer or UV module as specified | Enclosure, operator exposure, wavelength, validated dose | UV-C controls |
| Electrical power and drivers | SMARTARC/HBX systems where specified | Lamp-driver match, ignition and operating mode | Power supplies |
This is a navigation aid, not a list of universally compatible replacements. A listed source family must still be verified for the installed machine.
Manufacturer document library
Official Ushio brochures, technical references and safety publications.
These destinations originate from the Ushio America catalogs and data sheets resource. Direct document links are useful for engineering reference, but the current manufacturer directory and exact product record should be checked for updated revisions. Some PDFs are large or may require a separate download.
| Manufacturer resource | Intended use | Documentation status |
|---|---|---|
| Official catalogs & data sheets | Primary current manufacturer document directory; individual PDF revision should be confirmed. | Manufacturer-hosted reference · verify edition |
| UV/IR technical lamp references | Manufacturer terminology, safety overview and glossary; verify edition. | Manufacturer-hosted reference · verify edition |
| UV/IR ultraviolet lamp selection | Manufacturer UV family overview; not an approval for any application. | Manufacturer-hosted reference · verify edition |
| UV/IR excimer & XEFL | Excimer family background; system-level validation required. | Manufacturer-hosted reference · verify edition |
| UV/IR QIH heater lamps | Quartz infrared configurations and nominal characteristics. | Manufacturer-hosted reference · verify edition |
| QIH full heater catalog | Heating application and detailed lamp family information. | Manufacturer-hosted reference · verify edition |
| QIH safety & handling | Hot lamp, electrical, fragile quartz and handling precautions. | Manufacturer-hosted reference · verify edition |
| PAV lamp safety & handling | Short-arc and specialized lamp hazards; review the applicable lamp instructions. | Manufacturer-hosted reference · verify edition |
| Graphic arts lamps brochure | Printing/graphic arts lamp technologies; verify version. | Manufacturer-hosted reference · verify edition |
| 172 nm excimer overview | Manufacturer product overview; does not establish system-level exposure safety. | Manufacturer-hosted reference · verify edition |
Document access and revision control
Technical education
Understand optical and electrical terms before buying.
| Term | What to check | Why it matters |
|---|---|---|
| Radiant power / radiometric output | Optical watts or watts/nm under defined conditions | Affect exposure or measurement performance; not the same as lamp electrical watts. |
| Irradiance | Power received per unit area at a defined plane | Impacts substrate exposure and process repeatability. |
| Spectral distribution | Emission versus wavelength; filter/optic transmission | Determines whether the source matches photoresist, fluorescence or other wavelength-dependent needs. |
| Arc gap / focal geometry | Position and physical extent of the source | Can affect collector coupling and alignment; two same-watt sources may differ. |
| Power supply / ignitor | Starting requirements, steady-state control and compatible ballast | Incompatible supplies may cause failure, instability or hazards. |
| Average/rated life | Definition, test conditions and end-of-life criteria | Does not guarantee unchanged output or a universal replacement interval. |
| MOL / base / leads | Maximum overall length, lead or socket configuration | Mechanical and electrical mismatches can prevent safe installation. |
| Burning position / cooling | Mounting orientation and airflow or forced cooling | Essential for thermal management, arc position and manufacturer-approved operation. |
For process-control applications, distinguish electrical power from light delivered to the work surface. A lamp can illuminate while its usable spectral irradiance, uniformity or output stability no longer meets a facility’s limits.
Short-arc technology
Mercury, xenon and enhanced metal arc lamps are different optical systems.
Mercury short arc
USH series
Xenon short arc
UXL series
Enhanced metal arc
EmArc / SMR
System components
Power supply and optics
| Exact SOSCleanroom model | Listed family | Selection note |
|---|---|---|
| USH200DP | 200W short-arc mercury | Confirm OEM geometry, mounting and supply; not interchangeable solely by wattage. |
| USH205DP | 200W short-arc mercury | A distinct model from USH200DP; compare exact part number and approved instrument. |
| USH350DS | 350W short-arc mercury | Compare arc dimensions, operation and mechanical orientation. |
| USH350DP | 350W short-arc DC source | SOS storefront descriptions disagree on mercury versus mercury-xenon classification. Verify official lamp type. |
| USH508SA | 500W short-arc mercury | Confirm power-control mode, cooling and burning position. |
| UXL-S75MA | 75W short-arc xenon | A xenon lamp candidate; confirm arc coupling and supply compatibility. |
| UXL-S150MO | 150W short-arc xenon | Different model and mechanics from UXL-150S; verify fixture requirements. |
| UXL-150S | 150W short-arc xenon | Do not substitute for other 150W xenon designs without review. |
| SMR-200D1 | 200W EmArc enhanced metal arc | Requires matched supply and appropriate luminaire design. |
| HBX-76 | Electronic short-arc power supply | Confirm exact lamp/supply pairing against the manufacturer compatibility list. |
USH350DP catalog discrepancy
Semiconductor & photolithography
Photolithography and semiconductor illumination require tool-specific qualification.
In exposure and metrology tools, the light source participates directly in process control. The required lamp is defined by the complete optical system—illumination module, reflector, filtration, power regulation, exposure control, alignment and equipment-specific mechanical geometry. A replacement with the same power rating can still alter dose, throughput, uniformity or qualification status.
Exposure band
Spectral match
Source location
Arc or filament placement
Process control
Dose and stability
Manufacturing continuity
Revision and spares
For more detailed background from SOSCleanroom’s semiconductor-lighting experience, see Photolithography & Stepper Lamp Technical Article and Semiconductor Lighting Selection.
| SOSCleanroom semiconductor candidate | Use-case category | Qualification caution |
|---|---|---|
| QIH240-1000/ZD | IR heating / process | Evaluate reflector configuration, voltage, terminals, length and mounting. |
| QIH240-1600/S | Process thermal equipment | Dedicated equipment fit is essential; do not generalize from wattage. |
| QIH480-6000ASM | Semiconductor process heating | Used in OEM-specific heating systems; verify revision and tool configuration. |
| JCV120V-1000WBH/H | Semiconductor / optical | Confirm equipment socket, voltage and thermal constraints. |
| JCV120V-1000WBM/XX | Semiconductor / optical | Similar names can identify different variants; use full model suffix. |
Do not infer stepper compatibility
Infrared & reactor lamps
Quartz infrared heating is a thermal process-control decision.
Ushio QIH lamps are used across controlled heating, drying and industrial thermal processes. Matching only power can be misleading: terminal style, filament length, reflector coating, heating pattern and operating orientation can all matter. For semiconductor reactors, tool and chamber configuration must be confirmed with the OEM and purchasing record.
Heating profile
Energy delivered
Lamp geometry
MOL and lighted length
Thermal safety
Cooling and enclosure
Technical literature
QIH reference
| Direct product | Application grouping | Important check |
|---|---|---|
| QIH240-1000/ZD | IR heating / process | Evaluate reflector configuration, voltage, terminals, length and mounting. |
| QIH240-1600/S | Process thermal equipment | Dedicated equipment fit is essential; do not generalize from wattage. |
| QIH480-6000ASM | Semiconductor process heating | Used in OEM-specific heating systems; verify revision and tool configuration. |
UV curing, printing & excimer
Select by process wavelength, dose and actual exposure geometry.
Graphic arts, UV-curing, surface treatment and advanced processing require different irradiation systems. A brochure can identify a lamp family, but cannot determine the exposure dose, surface result or material compatibility for an installed process. Review the Ushio Graphic Arts lamps brochure, UV lamp family reference and excimer literature.
| Process variable | Engineering question | Record in qualification |
|---|---|---|
| Wavelength and filters | Is the delivered band appropriate for the chemistry, detector or surface? | Spectral source, optics and transmission. |
| Irradiance and exposure | Is delivered power/dose controlled and measured at the process plane? | Radiometer, spatial uniformity and exposure recipe. |
| Thermal effects | Could heating damage inks, optics, polymers or substrates? | Thermal limits, cooling and substrate response. |
| Aging and replacement | What output loss or instability triggers intervention? | Baseline, trending, change interval and verification. |
| Operator control | How are UV exposure, ozone or other hazards addressed? | Guarding, interlocks and safety assessment. |
Industrial printing cleaning and maintenance recommendations are addressed separately in SOSCleanroom’s Printing Industry Guide.
UV-C and disinfection
UV-C output does not automatically establish validated microbial control.
A low-pressure UV lamp or an excimer-based module can be part of an engineered disinfection process. Efficacy depends on wavelength, irradiance, delivered dose, exposure geometry, soil/shadowing and the organism or performance target. Avoid claims that a lamp makes a room, product or surface “sterile” without an appropriate validated process.
Personnel exposure
Prevent unintended radiation
Exact application
Match source and equipment
Representative listing
GTL-3G
Manufacturer background
Excimer resources
Halogen & general specialty
Long-life lamp variants and electrical suffixes must be matched exactly.
Halogen and specialty incandescent lamps may appear simpler than arc sources, but small changes in envelope, filament height, socket, reflector and voltage can change optical performance, temperature and safety. In precise imaging or semiconductor applications, the complete part number—including suffixes—belongs in the approved-parts list.
| SOSCleanroom model | Catalog description | Review before replacing |
|---|---|---|
| JCV120V-1000WBH/H | Long-life FEL-type halogen | Confirm equipment socket, voltage and thermal constraints. |
| JCV120V-1000WBM/XX | Long-life FEL-type halogen | Similar names can identify different variants; use full model suffix. |
| JCV120V-750WBH1 | 750W halogen | Match lamp geometry, operating voltage and rated fixture limits. |
| JCD120V-800WC | 800W halogen | Match exact base and operating envelope. |
| JCD120V-300WC | 300W halogen | Not equivalent to a different socket or reflector design. |
| J120V-1000WB | 1000W halogen | Specific shape and fixture requirements must be checked. |
Quartz handling
Compatible electronics
Short-arc lamps need the right power supply and ignition controls.
A high-pressure arc lamp is not operated like a conventional line-voltage light bulb. Confirm the ignition requirements, stabilized current or power range, electrical protection, enclosure/interlocks and thermal design for the specific lamp–supply combination.
Ushio product
HBX-76
Critical check
Never pair by wattage alone
Documentation
Reference product sheets
Inspection
Verify after replacement
Shop exact SOSCleanroom models
Direct links to current SOSCleanroom product pages.
These are live catalog destinations checked during the October 28, 2026 page review. They are not generic search links or blanket compatibility recommendations. Always verify current listing details, stock, edition and technical specifications at the point of purchase.
Microscopy / UV-visible
USH200DP — 200W short-arc mercury
Optical / analytical
USH205DP — 200W short-arc mercury
High-radiance optical
USH350DS — 350W short-arc mercury
High-radiance optical
USH350DP — 350W short-arc DC source
UV optical systems
USH508SA — 500W short-arc mercury
Scientific illumination
UXL-S75MA — 75W short-arc xenon
Scientific illumination
UXL-S150MO — 150W short-arc xenon
Scientific / optical
UXL-150S — 150W short-arc xenon
Specialty photonics
SMR-200D1 — 200W EmArc enhanced metal arc
Supporting equipment
HBX-76 — Electronic short-arc power supply
IR heating / process
QIH240-1000/ZD — 1000W quartz infrared heater
Process thermal equipment
QIH240-1600/S — Quartz infrared heater
Semiconductor process heating
QIH480-6000ASM — ASM barrel reactor lamp
Semiconductor / optical
JCV120V-1000WBH/H — Long-life FEL-type halogen
Semiconductor / optical
JCV120V-1000WBM/XX — Long-life FEL-type halogen
High-output optical
JCV120V-750WBH1 — 750W halogen
Optical / specialty
JCD120V-800WC — 800W halogen
Optical / specialty
JCD120V-300WC — 300W halogen
Optical / specialty
J120V-1000WB — 1000W halogen
UV equipment
GTL-3G — 3W E17 germicidal lamp
For the complete brand assortment, visit Ushio brand catalog or Semiconductor lighting category. Prices and availability are intentionally not duplicated here because they can change.
SOSCleanroom and LampTech
Use the appropriate storefront without assuming shared checkout or availability.
SOSCleanroom is the principal product destination for this technical library. LampTech’s Ushio catalog contains additional specialty-lighting listings and can help locate legacy lamp descriptions. The stores use separate pages and checkout systems; cross-site part numbers should still be compared to the manufacturer’s documentation.
| Model or resource | SOSCleanroom | LampTech |
|---|---|---|
| USH200DP | SOSCleanroom USH200DP | LampTech USH200DP |
| Ushio brand selection | SOSCleanroom Ushio brand | LampTech Ushio brand |
| Specialty lighting navigation | SOS Light Bulbs guide | LampTech short-arc category |
No automatic product equivalence
Lamp replacement checklist
A practical 12-point replacement and engineering-approval checklist.
| Check | Required documentation / action |
|---|---|
| 01 · Tool identity | Equipment manufacturer, tool model, serial/revision and lamp module. |
| 02 · Installed lamp | Photograph or record the full Ushio/other manufacturer model, ordering code and label. |
| 03 · Electrical input | Voltage, nominal wattage, ballast/driver, ignition and current/power requirements. |
| 04 · Mechanical envelope | Maximum overall length, diameter, leads, base, orientation and mount. |
| 05 · Optical geometry | Arc/filament location, gap, light-center length, reflector coupling and alignment. |
| 06 · Spectral requirement | Wavelength distribution and spectral tolerance for the task. |
| 07 · Output requirement | Required irradiance, uniformity, warm-up and stability at the process plane. |
| 08 · Thermal management | Cooling mode, airflow/water-cooling, temperature and duty cycle. |
| 09 · Safety design | Shielding, interlocks, operating pressure, UV/IR exposure and electrical procedures. |
| 10 · Manufacturer revision | Current Ushio sheet; note when a catalog PDF is historical or undated. |
| 11 · Change control | OEM approval, alternate authorization, process qualification and installation record. |
| 12 · Supply continuity | Stock by model, annual demand, critical spare level and approved procurement route. |
Use SOSCleanroom quote request to send the precise requirements rather than asking for a replacement based only on an informal description.
Operator and equipment safety
Apply controls appropriate to high-pressure discharge, UV, heat and electrical hazards.
High pressure
Arc lamps
UV/IR radiation
Eye and skin exposure
Electrical
Ignition and supply
Fragile glass
Handling and contamination
Hazardous materials
Mercury-containing lamps
Heat load
Enclosures and cooling
Review the manufacturer QIH safety sheet and PAV lighting safety reference as appropriate, but use the exact model instructions and equipment manual for the actual procedure.
Maintenance diagnostics
Common symptoms should trigger an investigation, not an unqualified lamp change.
| Observed condition | Possible contributors | Appropriate response |
|---|---|---|
| Reduced irradiance | Lamp aging, dirty optics, filters, power regulation, misalignment | Check calibrated output at defined conditions; isolate optics vs. source. |
| Unstable output | Power supply, cooling, lamp aging, electrode condition | Trend source behavior and test approved supply and cooling. |
| Failure to ignite | Ignitor, interlock, lamp end of life, wrong part | Follow OEM diagnostics; avoid repeated unqualified ignition attempts. |
| Uneven exposure | Optical alignment, reflector, arc/filament position, contaminated optics | Evaluate optical path and radiometric uniformity. |
| Premature failure | Heat, airflow, cycling, handling contamination, over-voltage | Investigate the actual service conditions and recorded replacement history. |
| Broken lamp or quartz damage | Thermal/mechanical shock, handling or equipment fault | Isolate equipment and follow the established safety response. |
Failure investigation
Engineering and quality documentation
Qualify exact models and preserve evidence for critical optical processes.
Document control
Manufacturer identity
Receiving
Incoming checks
Installation
Authorized procedure
Operational release
Baseline performance
Trend
Lifetime and failures
Alternate approval
No silent substitutions
For a broader documentation framework, see the SOSCleanroom Technical Vault and SpecialtyOptical resources.
B2B procurement and RFQs
What to provide for fast, accurate lamp sourcing.
| RFQ field | Example of useful detail |
|---|---|
| Installed equipment | Make/model, lamp module, serial or machine revision. |
| Exact lamp | Ushio part number and full suffix, manufacturer order code, photo of label if available. |
| Intended use | Microscopy / lithography / heating / UV curing / analytical / germicidal. |
| Duty cycle | Hours/day, starts/day and planned replacement intervals. |
| Quantity and urgency | Number required now, critical spare requirement, annual demand. |
| Data requirements | Technical sheet, handling instructions, lot or traceability documentation when supplied. |
| Approved alternates | Written alternate-part and qualification rules, if any. |
| Delivery | Ship-to region, special handling and receiving constraints. |
Use Quote Request Submission to start a sourcing request, or call 800-443-7101. SOSCleanroom assists with candidate sourcing and documentation; the customer’s OEM and engineering/quality system determine the final approved replacement.
Practical training scenarios
Use these cases in technician onboarding and SOP reviews.
Scenario A
Microscope UV output declines
Scenario B
Two 350W lamp listings differ
Scenario C
Semiconductor IR lamp fails
Scenario D
UV process undercures
Scenario E
Research xenon supply swap
Scenario F
Germicidal device repair
Frequently asked questions
Answers for lamp buyers, maintenance teams and engineers.
Where can I find current Ushio brochures?
Begin with Ushio America’s official Catalogs & Data Sheets directory. Use a current model-level sheet for any controlled approval, since published family brochures can be older.
Why include brochures if I must also confirm a datasheet?
Brochures explain product families and terminology. Exact electrical, optical, mechanical and safety qualification requires model-level documentation.
Are USH200DP and USH205DP interchangeable?
No interchangeability is established here. They are distinct catalog model numbers; verify the specific OEM-approved lamp.
Is USH350DP a mercury or mercury-xenon lamp?
SOSCleanroom and LampTech descriptions differ. The guide does not resolve that conflict; use current Ushio documentation for the exact manufacturing code.
Is a mercury lamp the same as a xenon short-arc lamp?
No. They are different lamp technologies with potentially different spectral, electrical and optical characteristics.
Will any 150W xenon lamp fit my instrument?
No. Verify model, socket, enclosure, supply, arc geometry and other OEM requirements.
What is arc gap?
The distance between arc electrodes in the specified lamp geometry. It can affect optical coupling; use the manufacturer’s defined measurement and tolerances.
Does equal wattage mean equal UV output?
No. Electrical input does not establish the spectral irradiance delivered through a particular optical system.
Which Ushio lamp works in a semiconductor stepper?
The exact stepper/tool and optical module determine approved part compatibility. Consult the OEM and current lamp data; no general-purpose replacement is recommended.
What are g-line, h-line and i-line?
They are historical mercury spectral lines at approximately 436, 405 and 365 nm respectively, used in some lithographic applications. Their relevance depends on the tool and process.
Can I use a QIH heating lamp with another reactor?
Only after confirmation by the equipment manufacturer and engineering review. Physical, terminal, electrical, thermal and control differences can make seemingly similar lamps unsuitable.
Can I handle quartz lamps without gloves?
Follow the specific Ushio instructions. For applicable halogen/quartz envelopes, skin oils and handling damage can be harmful; use approved clean gloves and procedures.
Can a UV-C lamp make a room sterile?
Not by itself. Effective microbial control requires a validated dose, geometry and process plus required personnel exposure controls.
How do I choose an arc-lamp power supply?
Use the manufacturer’s exact compatibility and equipment/OEM requirements, including ignition characteristics and operating regime.
Why did you not link the PAV xenon short-arc PDF?
The referenced manufacturer file returned 404 during the October 2026 review. The official catalog directory is provided instead.
Do you display current prices or inventory in this guide?
No static prices are repeated; open the exact SOSCleanroom product destination for live listing details and availability.
Can LampTech and SOSCleanroom be used interchangeably at checkout?
They are separate storefronts. Use the relevant product link and checkout, and validate the identical manufacturer model before purchasing.
How does SOSCleanroom help with a discontinued source?
Provide the complete equipment and lamp identifiers and approved-alternate criteria for technical sourcing assistance. Availability and substitutions require confirmation.
What should a replacement inspection record contain?
At minimum the tool and lamp identity, model, technician, date, relevant safety checks, and performance/qualification evidence required by the facility.
Where should I send a purchase specification?
Use the SOSCleanroom Quote Request Submission page and include exact part numbers, equipment models, volumes and required documentation.
Source basis
Documentation, revision and qualification boundaries.
Research basis: the live SOSCleanroom Ushio brochure page, live SOSCleanroom Ushio/lighting product listings, the Ushio America Catalogs & Data Sheets directory and the manufacturer-hosted references linked above. The latter may not always be the newest edition; published manufacturer documentation should be rechecked before an engineering approval.
| Primary source | What is supported |
|---|---|
| Ushio America literature hub | Document families, brochure categories and model-level datasheet access. |
| Ushio UV/IR technical reference | Lamp terminology and technical reference background. |
| Ushio QIH catalog | Infrared heating lamp families, dimensions and applications. |
| Ushio safety handling | Selected lamp handling and thermal precautions. |
| SOSCleanroom Ushio brand page | Available product-model destination pages; individual prices/inventory may change. |
| SOSCleanroom photolithography article | SOSCleanroom application education and historical industry context. |
Manufacturer specifications, OEM installation manuals, validated facility SOPs and applicable safety rules take precedence over educational summaries or generic cross-references. Product and document links were reviewed October 28, 2026.
SOSCLEANROOM | SPECIALTY PHOTONICS & LAMP SOURCING
Need the Correct Ushio Model? Start With the Equipment Details.
Send the lamp model and complete suffix, existing manufacturer ordering code, equipment model, electrical and optical requirements, operating environment, and quantities. SOSCleanroom can help locate the appropriate catalog product and sourcing documentation while your engineering team retains responsibility for final compatibility and process qualification.
Request a Technical Quote →Browse All Ushio Products →Call 800-443-7101
Educational and product-selection scope: Reviewed October 28, 2026. This guide is not a substitute for manufacturer installation instructions, approved tool part lists, radiation exposure controls, electrical safety procedures, hazardous-waste requirements, process validation, or a written OEM interchangeability approval. Product descriptions, availability and documentation may change. No claim is made that all catalog lamps are cleanroom qualified or directly interchangeable.