Category Overview
Semiconductor Lighting
Specialty Lamps for Wafer Inspection, Lithography, Metrology & Semiconductor Tools
Spectral Precision Tool Compatibility Process Stability
Semiconductor lighting plays a critical role in inspection, exposure, and metrology processes where wavelength accuracy, output stability, and mechanical fit directly impact yield and process control. These specialty lamps are engineered to meet OEM specifications for semiconductor tools and should be selected as precision components—not generic replacements.
Best suited for: wafer inspection systems, lithography and mask aligners, metrology tools, semiconductor process equipment, and microelectronics manufacturing environments where uptime, repeatability, and optical performance are non-negotiable.
UV exposure & lithography
→ Short-arc mercury (HBO) lamps
High-brightness inspection
→ Xenon short-arc (XBO) lamps
Tool-specific illumination
→ OEM-specified specialty lamps
Selection Guide
How to select the correct semiconductor lamp
Semiconductor lamp selection is a strict matching exercise. The correct lamp restores OEM performance, protects optical assemblies, and maintains process repeatability. Always confirm the full specification before replacement.
Why lamp selection matters in semiconductor tools
Semiconductor processes rely on tightly controlled optical conditions. Deviations in wavelength, arc position, intensity, or stability can affect defect detection, exposure accuracy, and metrology results. Using incorrect or “close enough” lamps increases variability and risk to yield.
- Spectral output: directly affects inspection and exposure performance
- Mechanical fit: arc alignment and base geometry must match the tool design
- Electrical compatibility: protects power supplies and lamp housings
- Stability: supports repeatable measurements and process control
Common mistakes to avoid
- Selecting by wattage only without confirming arc and spectrum
- Ignoring ozone-producing vs. ozone-free variants
- Using non-qualified substitutes in critical tools
- Improper handling that shortens lamp life or affects output
Quick match: semiconductor task to lamp type
| Your application | Typical lamp direction | Why it fits |
|---|---|---|
| Lithography / UV exposure | Short-arc mercury (USH, SUV, HBO) | High UV output and stable arc position. |
| Bright-field inspection | Short-arc xenon (UXL, XBO) | Broad-spectrum, high-intensity white light. |
| Metrology / analytical tools | OEM-specified specialty lamp | Maintains instrument accuracy and repeatability. |
Best-practice semiconductor lamp handling and replacement
- Confirm exact part number: match lamp series, wattage, arc, and base.
- Handle carefully: avoid contamination, shock, or misalignment.
- Observe warm-up cycles: output stabilizes after proper warm-up.
- Track operating hours: replace proactively to avoid drift or downtime.
- Follow OEM procedures: maintain tool qualification and warranty requirements.
For the fastest recommendation, be ready to share: tool make/model, current lamp part number, wattage, and whether ozone-free output is required.
Need help selecting?
Talk to a semiconductor lighting specialist
Email Sales@SOSsupply.com or call (214) 340-8574 for help matching the correct semiconductor lamp to your tool and process.